Monolithic Ultra-Low-Loss Si3N4 / Si Photonic Platform for High Delay Density
2023 IEEE Silicon Photonics Conference (SiPhotonics)(2023)
Abstract
We demonstrate a photonic platform that monolithically combines traditional crystalline Si waveguides and ultra-low-loss Si
3
N4 waveguides (1.6dB/m) in a foundry-ready process. The material co-integration demonstrates high-density low loss delays and high-speed switch capabilities traditionally out of reach of Si
3
N4-only platforms, enabling high-performance analog photonics.
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Key words
Silicon nitride, silicon photonics, optical device fabrication
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