Low-Phase-Error Silicon 90° Optical Hybrid with Large Fabrication Tolerance
2023 IEEE Silicon Photonics Conference (SiPhotonics)(2023)
摘要
A novel silicon 90° optical hybrid with large fabrication tolerance for the phase error is demonstrated. A high yield of 99.94% for| phase error| < 5° in the wavelength range of 1.525 - 1.57µm is achieved by using two fabricated wafers.
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关键词
90° optical hybrid,Silicon Photonics,integrated coherent receiver (ICR)
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