Monolithic integrated cavity optomechanical accelerometer based on push-pull photonic crystal zipper cavity

We propose a monolithic integrated cavity optomechanical accelerometer based on push-pull photonic crystal zipper cavity. The accelerometer integrates grating couplers, phase modulators, acceleration sensing unit, and electrostatic force feedback module on a chip. We use push-pull structure to eliminate the coupling crosstalk caused by paraxial acceleration and extend its range using electrostatic force feedback module. The transmissive photonic crystal zipper cavity structure is adopted to improve the integration and stability of the system. Accurate results are demonstrated as follows: the bandwidth is larger than 20 kHz, the mechanical sensitivity is 369 pm/g, the measuring range is +/- 100g, and the noise equivalent acceleration is 5.06 mu g/Hz. With its advantages, the accelerometer can be used in consumer electronics, aerospace, resource exploration, and other fields. (c) 2023 Society of Photo-Optical Instrumentation Engineers (SPIE)