Effect of In-Situ SiNx Grown with Different Carrier Gas on Structural and Electrical Properties of GaN-based MISHEMTsHaochen Zhang, Yao Chen,Yue Sun,Lei Yang,Kunpeng Hu,Zhe Huang,Kun Liang,Zhanyong Xing,Hu Wang,Mingshuo Zhang,Shiping Guo,Haiding SunAPPLIED PHYSICS LETTERS（2023）引用 11|浏览23关键词Thin Film GrowthAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
