Characterization and Current Modeling of Stacked high-$\kappa$ Metal-Insulator-Metal Capacitors

Gui-Sheng Chao,Wei-Hua Chen,Kuan-Ju Chen,Chrong-Jung Lin,Ya-Chin King

2023 International VLSI Symposium on Technology, Systems and Applications (VLSI-TSA/VLSI-DAT)（2023）

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摘要

A new leakage current model for explaining the asymmetry characteristics of Metal-Insulator-Metal capacitor is proposed in this study. To improve the capacitance density while minimizing its leakage current level, new layering designs of high- $\kappa$ dielectric materials are investigated with verification on the proposed model.

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