Modeling, fabrication, and readout of compact optomechanical accelerometers Brina B. Martinez,Andrea Nelson,Adam Hines, Jonathan P. Mock,Guillermo Valdes,Jose Sanjuan,Felipe GuzmánMOEMS and Miniaturized Systems XXII(2023)引用 0|浏览3暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要