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First results on the functional characterization of two rotary comb-drive actuated MEMS microgripper with different geometry

Gabriele Bocchetta,Giorgia Fiori,Andrea Scorza,Nicola Pio Belfiore,Salvatore Andrea Sciuto

Proceedings of the 25th IMEKO TC4 International Symposium and 23rd International Workshop on ADC and DAC Modelling and Testing（2022）

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