Ultrafast Infrared Laser Crystallization of Amorphous Si/Ge Multilayer Structures.

Alexander V. Bulgakov,Jiri Beranek,Vladimir A. Volodin,Yuzhu Cheng,Yoann Levy,Siva S. Nagisetty,Martin Zukerstein,Alexander A. Popov,Nadezhda M. Bulgakova

MATERIALS（2023）

引用 5|浏览38

关键词

silicon-germanium multilayer structures,thin films,ultrashort infrared laser annealing,selective crystallization,defect accumulation,Raman spectroscopy,laser-induced stresses

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