Microwave Diamond-Based HBAR As a Highly Sensitive Sensor for Multiple Applications: Acoustic Attenuation in the Mo Film
Sensors（2023）
关键词
high overtone bulk acoustic resonator (HBAR),quality factor,microwave band,ultrasonic sensor device,microwave hypersonic attenuation,molybdenum magnetron deposition,single-crystalline diamond,aluminum-scandium nitride
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