Role of Oxygen in Vacancy-Induced Phase Formation and Crystallization of Al₂TiO₅-Based Chemical Vapor-Deposited Coatings

Oxygen is a commonly overlooked element influencing the properties of many metal oxides. By combining several analytical in situ techniques and theoretical calculations, we demonstrate that oxygen plays a vital part in the phase formation and crystallization of Al2TiO5-based chemical vapor-deposited coatings. Rutherford backscattering spectrometry (RBS) corroborates a polymorphic transformation during crystallization. Subsequent hard X-ray photoelectron spectroscopy (HAXPES) shows that crystallization occurs through a displacive (diffusionless) mechanism. Coupled with theoretical calculations, the crystallization and co-formation of Al2TiO5, Al6Ti2O13, and Al16Ti5O34 are suggested to be driven by the migration of oxygen ions and their corresponding vacancies.