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Breakdown and Photoconductivity Enhancement by Mixed Reflective Al-Doped ZnO/Ag Electrode in Vertical SiC Photoconductive Switch

IEEE Electron Device Letters(2023)

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摘要
An axial-triggering vertical SiC photoconductive switch with Al-doped ZnO placed under the Ag electrode is developed to enhance breakdown strength and photoconductivity. Traditional and new devices with the AZO/SiC/Ag and AZO/SiC/AZO/Ag structures, respectively, were prepared. Test results show that the conductivity of the new device is approximately 1.2 times higher than that of the old one, attributable to the diffuse reflection effects of the AZO/Ag mirror. Under high bias voltages of up to 16.5 kV/mm and a 30-ns pulse width laser input, the new device shows significantly enhanced breakdown strength. The new device has a lifetime of >1E4 shots, whereas the old device has a maximum lifetime of approximately 1E2 shots. The new device can continuously output electrical pulses for 10 minutes at a 100 Hz repetition rate, 30-ns pulse width, and 100 A peak current without breakdown.
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关键词
Silicon carbide photoconductive switch,axial triggering,breakdown,photoconductivity,transparent electrode
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