A High-Performance Resonant MEMS Accelerometer with a Residual Bias Error of 30 Μg and Scale Factor Repeatability of 2 Ppm
2023 IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS, INERTIAL（2023）
关键词
MEMS,accelerometer,inertial sensor,resonant,sensor,bias,scale factor,high-performance,navigation,VBA
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