A Digital Twin to Model the Impact of Etch Profile on MEMS Gyroscope Performance

Christopher J. Welham,Arnaud Parent, Eran Valfer, Bryan Helmer, Tommi Piirainen, Matti Liukku,Mikko Partanen

2023 IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS, INERTIAL（2023）

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关键词

MEMS Gyroscope,Digital Twin,DRIE sidewall angle,Finite element analysis,Quadrature compensation

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