Atomic Layer Processing of MoS2

Molybdenum disulfide (MoS 2 ) is one of several transition metal dichalcogenides consisting of a layer of transition atoms sandwiched between layers of chalcogens.[l] Interest in MoS 2 has been driven by the fact that it exhibits a 1.8 e V direct electronic band gap in monolayer form and retains a moderate electron mobility (>10 cm ² /Vs) even when only ∽6.5 Å (three atoms) thick. [2] These properties offer potential for retaining or improving speed and efficiency in scaled electronic devices.