Automated RRAM measurements using a semi-automated probe station and ArC ONE interface

Alin G. Panca,Alexantrou Serb,Spyros Stathopoulos,Suresh K. Garlapati,Themis Prodromakis

2023 35th International Conference on Microelectronic Test Structure (ICMTS)（2023）

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摘要

Resistive Random Access Technology (RRAM) is quickly reaching industrial maturity. A key element towards achieving lasting commercial success, however, is automated testing; useful for performance benchmarking and rapid prototyping of new flavours of technology. Here we present a wafer-scale semi-automated RRAM device testing platform.

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关键词

automation,memristor,RRAM,characterization

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