Reliability Analysis of Metalorganic Chemical Vapor Deposition Device

The metalorganic chemical vapor deposition (MOCVD) device is used for the growth of semiconductor materials. The reliability of MOCVD is vital to the safe operations of MOCVD. As a reliability analysis tool, failure mode and effects analysis (FMEA) can be used to assess the reliability of MOCVD. To deal with the difficulty of the weighting risk factors of FMEA, the weights of risk factors are obtained based on the technique for order preference by similarity to ideal solution (TOPSIS). The solenoid valve in the pipeline of MOCVD is analyzed as the case study. The results can support the risk management of MOCVD.