Frequency Tuning of In-Plane Comb Drive MEMS Resonators Due to VO₂ Phase Transition

Juan Pastrana,David Torres,LaVern Starman,Jose Figueroa,Harris Hall,Nelson Sepulveda

Journal of Microelectromechanical Systems（2023）

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摘要

This letter reports the thermal-mechanical tuning capability of an in-plane comb drive resonator using VO2 phase transition material. By inducing the insulator-to-metal transition (IMT) using a heat conduction method, a shift of approximately 2% was observed. The frequency tuning was attributed to the induced stresses during the IMT. 2022-0200

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关键词

Resonators,Resonant frequency,Temperature measurement,Tuning,Silicon,Stress,Micromechanical devices,Comb drive,resonators,frequency tuning,vanadium dioxide,tunable microelectromechanical systems,PolyMUMPs

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Frequency Tuning of In-Plane Comb Drive MEMS Resonators Due to VO2 Phase Transition

Frequency Tuning of In-Plane Comb Drive MEMS Resonators Due to VO₂ Phase Transition