Low‐temperature Atmospheric Pressure Plasma Conversion of Polydimethylsiloxane and Polysilazane Precursor Layers to Oxide Thin Films
PLASMA PROCESSES AND POLYMERS（2023）
Key words
atmospheric pressure plasma,low-temperature conversion,organosilicon precursors,perhydropolysilazane,pulsed discharge
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined