ZnO-MEMS sensor-cell prepared by inkjet printing for low concentration acetone detection

•A simple method to fabricate porous ZnO for trace-level acetone detection.•MEMS structure with small size and high sensitivity.•Non-contact inkjet printing technology for the rapid prototyping of transducers.•The sensor with 3.2 response to 10 ppb acetone at 200℃.•A good linearity relationship between response and concentration of acetone.