Chemical vapor deposition of entropy-stabilized rock-salt type oxide thin films

Antoine Raison, Nathalie Prud'homme,Wu Wang,Diana Dragoe,Nita Dragoe

Materials Letters（2023）

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摘要

•High-entropy oxide (MgCONiCuZn)O synthesized by CVD.•The entropy-stabilized phase is obtained after annealing at 950 °C.•The lattice parameters are close to those of the same material synthesized by solid state or PVD.

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关键词

High-entropy oxide,Thin film,Chemical vapor deposition

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