High quality factor resonant metasurface with etchless lithium niobate

Actively tunable metasurfaces have widespread applications in optics from light modulation, beam steering to LiDAR and many others. Recently, lithium niobate (LN) based metasurfaces have attracted significant attention for their great potentials in integrated electro-optically tunable metadevices. However, the hardness and chemical inactivity of LN make it difficult to process, which severely limits the quality (Q) factors and performance of LN based metasurfaces. In this paper, a type of high Q etchless LN resonant metasurface is experimentally demonstrated. The metasurface shows a measured Q factor of 563 around the telecom wavelength and even higher Q factors are expected to be realized using similar designs in the future. This work represents an important progress for LN resonant metasurfaces and paves the way for the development of high performance electro-optically tunable LN metadevices.