Design of organic/inorganic multilayer water vapor barrier thin films deposited via plasma polymerization for encapsulation

•Plasma polymerized organic/inorganic multilayer structure was fabricated.•A calcium test was established to measure the water vapor transmission rate (WVTR).•Thin films’ thickness and pair number can influence the encapsulation capability.•The radius of curvature and the residual stress of the samples also affect the WVTR.