Controlling tin oxysulfide thin film compositions and electronic band structures using atomic layer deposition and vacuum annealing process
Thin Solid Films（2023）
Abstract
•Tin oxysulfide thin films were fabricated by super-cycle ALD.•Various material properties were analyzed according to oxygen and sulfur ratios.•Tin oxysulfide films exhibited both of SnS and SnO2 phases.•As the oxygen ratio increased, tin oxysulfide exhibited p-type characteristics.
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Key words
Tin oxysulfide,Thin film,Anion-mixed p-type semiconductor,Atomic layer deposition,Super-cycle method,Band structure
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