Homogeneous pressure decay in multi-chamber vacuum system with finite conductance

arxiv(2023)

引用 0|浏览0
暂无评分
摘要
We derived the geometrical parameters on the tube connections that homogenize the pressure drop in a multi-chamber vacuum system, where each chamber has a distinct volume and all are connected to the same vacuum pump. We start deriving the pressure drop in a single chamber for a tube with finite conductance. Next, we derive a solution that provides the radius and length for each tube connection between the chambers and the pump that homogenize the pressure drop in all chambers.
更多
查看译文
关键词
homogeneous pressure decay,vacuum,multi-chamber
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要