Homogeneous pressure decay in multi-chamber vacuum system with finite conductance
arxiv(2023)
摘要
We derived the geometrical parameters on the tube connections that homogenize the pressure drop in a multi-chamber vacuum system, where each chamber has a distinct volume and all are connected to the same vacuum pump. We start deriving the pressure drop in a single chamber for a tube with finite conductance. Next, we derive a solution that provides the radius and length for each tube connection between the chambers and the pump that homogenize the pressure drop in all chambers.
更多查看译文
关键词
homogeneous pressure decay,vacuum,multi-chamber
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要