Dielectric resonator in rectangular ТЕ102 cavity for electron paramagnetic resonance study of thin films

S.V. Lemishko,I.P. Vorona,V.O. Yukhymchuk,V.Ya. Bratus',S.M. Okulov,V.V. Nosenko,S.O. Solopan,A.G. Belous

Thin Solid Films（2023）

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Abstract

•Suitable geometry of dielectric resonator (DR) for thin films study was calculated.•DR was fabricated from BaTi4O9 + 8.5% ZnO ceramics (ε=36).•Application of DR increases filling factor by 5–12 times depending on films sizes.•EPR signal increase by ∼4 times was experimentally obtained for SiOx 950 nm film.

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Key words

Dielectric resonator,Electron paramagnetic resonance,Thin films,Barium tetratitanate,Signal sensitivity,Signal increase

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