The Effects of Hemisphere Dome Orientation on the Structure of Diamond-like Carbon Film Prepared Using Ion Beam Assisted Deposition.
Materials (Basel, Switzerland)(2023)
Abstract
Diamond-like carbon (DLC) has attracted significant attention in the recent decades because of its unique properties and applications. Ion beam assisted deposition (IBAD) has been widely established in industry due to the advantages of easy handling and scalability. In this work, a hemisphere dome model is specially designed as a substrate. The influence of the surface orientation on the coating thickness, Raman I/I ratio, surface roughness and the stress of the DLC films are examined. The reduction in the stress in the DLC films reflects the lower energy-dependence in diamond due to the varied sp3/sp2 fraction and columnar growth pattern. The variation of the surface orientation provides an efficient means of tailoring the properties and microstructure of the DLC films.
MoreTranslated text
Key words
DLC film,diamond-like carbon,hemisphere dome,ion beam assisted deposition,surface orientation
AI Read Science
Must-Reading Tree
Example
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined