Crystallinity improvement of room-temperature PLD-deposited ZnO thin films on cyclo-olefin polymer substrates subject to surface-pretreatment with vacuum-UV-light irradiation

Tomoaki Oga,Ryoya Kai,Naho Kaneko, Hisashi Miyazaki,Satoru Kaneko,Akifumi Matsuda,Mamoru Yoshimoto

Journal of Crystal Growth（2023）

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摘要

•VUV-irradiation of COP surface increased crystallinity of ZnO thin film on COP.•TEM revealed atomically sharp interface between ZnO thin film and VUV-treated COP.•Resistivity of ZnO thin film grown on VUV-treated COP substrate was reduced by 40%.

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关键词

A1. Crystallites,A1. Surface processes,A3. Physical vapor deposition processes,B1. Oxides,B1. Polymers,B1. Zinc compounds

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