Characteristics of Peak Exposure of Semiconductor Workers to Extremely Low-Frequency Magnetic Fields.

Ju-Hyun Park,Sangjun Choi,Dong-Hee Koh,Jihoon Park,Won Kim,Dong-Uk Park

Annals of work exposures and health（2023）

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摘要

Most of the activities and working locations next to machines generating ELF-MF in semiconductor operations showed high contributions of ELF-MF peak exposure to daily exposure dose despite their relative minor fraction of workers' daily time.

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关键词

ELF-MF,cutoff value,time-activity exposure pattern,wafer fabrication

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