High energy storage density of Bi3.25La0.75Ti3O12/SrTiO3 multilayer thin films by structural design

With the trend of miniaturization and integration of integrated circuits, thin film dielectric capacitors with high energy storage density and fast charge/discharge rate have attracted more and more attention. In this work, lead-free thin film dielectric capacitors with different stacking structures based on Bi3.25La0.75Ti3O12 and SrTiO3 were prepared by a sol-gel method on Pt/Ti/SiO2/Si substrate. By processing optimization, enhanced breakdown strength was obtained with fine hysteresis loops for the laminated Bi3.25La0.75Ti3O12/SrTiO3 films, leading to excellent energy storage performance of energy storage density similar to 58.96 J/cm(3) and efficiency similar to 81.59 %, which is attractive for the dielectric film energy storage capacitors.