Multifrequency nanomechanical mass spectrometer prototype for measuring viral particles using optomechanical disk resonators

2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)(2023)

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Abstract
Nanomechanical mass spectrometry allows characterization of analytes with broad mass range, from small proteins to bacterial cells, and with unprecedented mass sensitivity. In this work, we show a novel multifrequency nanomechanical mass spectrometer prototype designed for focusing, guiding and soft-landing of nanoparticles and viral particles on a nanomechanical resonator surface placed in vacuum. The system is compatible with optomechanical disk resonators, with an integrated optomechanical transduction method, and with the laser beam deflection technique for the measurement of the vibrations of microcantilever resonators. The prototype allows the in-vacuum alignment of resonators thanks to a dedicated visualization system. Finally, in this work, we have demonstrated the detection of gold nanoparticles, polystyrene nanoparticles and phage G viruses with optomechanical disks and microcantilever resonators.
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Key words
Nanomechanical mass spectrometry,optomechanical disk resonators,microcantilevers,mass sensing
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