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Contributions of Support Point Number to Mirror Assembly Thermal Sensitivity Control

Haixing Li, Hongwen Zhang,Yalin Ding,Jichao Zhang, Yuqi Cai

SENSORS(2023)

Cited 1|Views6
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Abstract
Due to the extreme environmental temperature variations, solutions that enable ultra-low thermal sensitivity in a mirror assembly are crucial for high-performance aerial optical imaging sensors (AOIS). Strategies such as the elimination of the coefficient of thermal expansion (CTE) mismatch and the employment of a flexure connection at the interface cannot be simply duplicated for the application involved, demanding specific design constraints. The contributions of support point number to the surface thermal sensitivity reduction and support stiffness improvement have been studied. A synthetic six-point support system that integrates equally spaced multiple ultra-low radial stiffness mirror flexure units and assembly external interface flexure units has been demonstrated on a 260 mm apertured annular mirror that involves significant CTE mismatch and demanding support stiffness constraint. The surface deformation RMS, due to the 35 degrees C temperature variation, is 16.7 nm.
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Key words
mirror mount,support system,thermal sensitivity,temperature variation
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