0.02 °/h, 0.004°/√h, 6.3-Ma NEMS Gyroscope with Integrated Circuit
IEEE Transactions on Instrumentation and Measurement（2023）
关键词
Gyroscopes,Nanoelectromechanical systems,Circuit stability,Piezoresistance,Navigation,Transistors,Micromechanical devices,Current-feedback instrumentation amplifier (CFIA),inertial navigation instrumentation,nanoelectromechanical systems (NEMS) gyroscopes
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