Analysis of spurious peaks at series resonance in solidly mounted resonators by combined BVD-Mason modelling
Ultrasonics(2023)
摘要
•Spurious peaks in SMRs can appear due to Ohmic losses (influence of series resistance)•Devices with larger active areas are more likely to display these undesired peaks.•Size of the active area has a limit to ensure good performance in SMRs.•Modelling of resonant spurious peaks using an updated mBVD and Mason’s models.
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关键词
FBAR,Mason model,Modified Butterworth,Ohmic losses,SMR,Spurious resonance
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