Ultrasound Transmission Through the Back Cavities of Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Arrays
2022 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS)（2022）
Abstract
We analyze and optimize the transmission of ultrasonic waves through the back-etched cavities of broadband PMUT arrays designed for medical imaging and non-destructive testing applications. We use a simple waveguide model to determine the acoustic impedance matching condition and investigate the effectiveness of the matching approach through Finite Element Modeling (FEM). We show that both the characteristic impedance and the finite elasticity of the cavity-filling material may affect the transducer bandwidth. The theoretical results are validated through electro-acoustic measurements carried out using 2MHz, 12-element, 2-D PMUT arrays.
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Key words
PMUT,Ultrasonic MEMS,PZT,Cavities,Acoustic Matching,FEM,Medical Imaging,Non-Destructive Testing
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