Thin films sputter-deposited from EUROFER97 in argon and deuterium atmosphere: Material properties and deuterium retention

•Plasma-facing components will be subjected to re-deposition in fusion reactors.•Sputter-deposited films from EUROFER97 were obtained in Ar and D2 mix atmosphere.•Ion beam analysis indicate very similar composition of the films and the bulk.•Films feature different hardness, and microstructure in comparison to the bulk.•Deposition in D2 + Ar atmosphere resulted in a low deuterium incorporation.