Fabrication of Vitreous Carbon Mold for Glass Moled Microarray

Glass micro-lens array (MLA) are attractive optical elements for light manipulation. Glass molding has been utilized for fabricating the MLA pattern for mass-scale production with high accuracy. Herein, a method to fabricate vitreous carbon (VC) mold with MLA pattern has been demonstrated for glass molding. The VC mold with MLA pattern was obtained by carbonization of furan precursor which was replicated from a PDMS mold. The intermediate PDMS mold was casted from a metal master mold using soft lithography method.