Sub-Nanometer Acoustic Vibration Sensing Using a Tapered-Tip Optical Fiber Microcantilever
Sensors (Basel, Switzerland)(2023)
摘要
We demonstrate a highly sensitive acoustic vibration sensor based on a tapered-tip optical fiber acting as a microcantilever. The tapered-tip fiber has a unique output profile that exhibits a circular fringe pattern, whose distribution is highly sensitive to the vibration of the fiber tip. A piezo transducer is used for the acoustic excitation of the fiber microcantilever, which results in a periodic bending of the tip and thereby a significant output power modulation. Using a multimode readout fiber connected to an electric spectrum analyzer, we measured the amplitude of these power modulations over the 10-50 kHz range and observed resonances over certain frequency ranges. Two types of tapered-tip fibers were fabricated with diameter values of 1.5 mu m and 1.8 mu m and their frequency responses were compared with a non-tapered fiber tip. Thanks to the resonance effect as well as the sensitive fringe pattern of the tapered-tip fibers, the limit of detection and the sensitivity of the fiber sensor were obtained as 0.1 nm and 15.7 V/nm, respectively, which were significantly better than the values obtained with the non-tapered fiber tip (i.e., 1.1 nm and 0.12 V/nm, respectively). The sensor is highly sensitive, easy to fabricate, low-cost, and can detect sub-nanometer displacements, which makes it a promising tool for vibration sensing, particularly in the photoacoustic sensing of greenhouse gases.
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关键词
acoustic vibration sensor,microcantilever,tapered-tip fiber
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