A Novel Fast Servo Tool Device with Double Piezoelectric Driving.

Micromachines(2022)

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摘要
The fast tool servo (FTS) technology has unique advantages in the machining of complex surfaces such as special-shaped targets and free-form surfaces. In view of the shortcomings in the performance of the existing FTS device, this paper puts forward a novel FTS which uses two piezoelectric ceramics instead of flexure hinges to provide restoring force. Firstly, the feasibility of the double-drive principle is verified theoretically, and the corresponding mechanism is optimized accordingly. Then, the system control hysteresis model is established and identified, and the appropriate control strategy is designed. Finally, the performances of the proposed FTS device are tested, and a typical microstructure is machined based on the device and ultra-precision lathe. The results indicate that the proposed device effectively improves the performance of the FTS system, which is useful for the processing of microstructures and free-form surfaces.
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关键词
FTS,double piezoelectric driving (DPD),hysteresis model,microstructure processing
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