MEMS Ion Optical Spectrometer for Methane Detection on Mars

Jan A. Dziuban,Pawel Knapkiewicz,Tomasz Grzebyk,Pin Chen

2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)（2022）

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摘要

The principle and first realization of subminiature MEMS ion spectrometer for detection and analyzing of trace gases at Mars including methane is presented. Mapping of methane sources and recognition of its origin (biotic vs abiotic) is among most wanted scientific targets of the planned Mars missions.

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关键词

Mars,Methane detection,MEMS ion spectrometer,MEMS preconcentrator

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