Towards a CMOS-Compatible Accelerometer Using Self-Powered Teng System

This paper exhibits an accelerometer based on a MEMS triboelectric nanogenerator (TENG) system. Unlike traditional mesa-scale TENGs, this device is fabricated using standard, scalable to high-volume manufacturing and CMOS-compatible processes. Compatibility with CMOS technologies opens a door for the creation of various integrated self-powered sensors and communication systems with electronic components. The presented self-powered accelerometer can measure the acceleration with direct voltage measurements from TENG output, where no external power is needed. The device exhibits linear behavior when sinusoidal base excitation is applied at each frequency.