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CVD单晶金刚石X射线位置探测器研制

LIU Xiao-chen,LI Zhen-jie,WANG Bing-jie,CHANG Guang-cai,LIU Peng, LIU Yao-guang,JIANG Long,AN Xiao-ming,LI Yi-feng,GE Xin-gang

Nuclear Electronics & Detection Technology（2022）

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Abstract
为满足高亮度同步辐射X射线的监测需求,采用微波等离子体化学气相沉积技术制备出CVD单晶金刚石材料,制作了一种四象限型X射线位置探测器(XBPM).实验测试结果表明:探测器暗电流小于0.2 pA;光强强度的测量精度为0.3％,位置分辨能力可以达到400 nm.该探测器能满足同步辐射X射线光束诊断的测量要求.
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