Electromagnetic Modeling of a Plasma Chamber: Theory and Experiments
Progress in Electromagnetics Research Symposium(2021)
Abstract
We propose finite element method — based models facilitating simulation of tuned plasma discharges in an argon atmosphere. The models, in which we focused on the adjustment options and relevant numerical analyses, allowed us to design a plasma discharge jet and to characterize the behavior of a discharge therein. A set of functional experiments were performed, evaluated, and compared throughout the research. Overall, the plasma chamber finds use in surface treatment at a nanometric distance from the material-air interface; such a procedure can produce special layers of inorganic/organic materials conceived as resonant structures. The paper exposes the ability of a plasma discharge to operate as a parametric instrument that alters the electromagnetic and mechanical properties on the surface of the applied material.
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Key words
electromagnetic modeling,plasma chamber,finite element method,tuned plasma discharges,argon atmosphere,adjustment options,relevant numerical analyses,plasma discharge jet,functional experiments,material-air interface,electromagnetic properties,mechanical properties
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