Magnetic-Field Dependent Electron Transport of Fe3Si Nanodots

IEICE TRANSACTIONS ON ELECTRONICS(2022)

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Abstract
We fabricated Fe-silicide nanodots (NDs) on an ultrathin SiO2 layer and evaluated changes in electron transport properties with and without magnetic field application. High-density NDs with an areal density as high as similar to 1011 cm-2 were formed on thermally grown SiO2 by exposing ultrathin Fe/Si-NDs structures to a remote H2 plasma without external heat-ing. In electron transport properties related to current-time characteristics for a diode with Fe electrode and charging energy to NDs, clear changes in current levels through NDs and electron injection modulation of NDs depending on intensity of magnetic fields were observed.
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Key words
nanodots, Fe-silicide, hydrogen plasma
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