Laser-structured ZnO/p-Si Photodetector with Enhanced and Broadband Responsivity
2021 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2021）
关键词
specific surface area,ALD deposition,ZnO thin films,laser-microstructure,ZnO-p-Si photodetectors,UV-Vis-NIR spectra,light absorption,ZnO-Si
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