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Etching of TiO2 nanopillar arrays by nanosphere lithography for broadband infrared antireflection applications

Bei Zhang,Xincun Peng,Luhao Yang,Jijun Zou,Chenyang Li,Chaoyan Zhong,Siyuan Liu, Linlin Jiang,Wenjuan Deng,Zhuming Liu,Liangliang Tang

Infrared Physics & Technology（2022）

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Abstract
•Large-area and highly ordered TiO2 nanopillar arrays (NPA) with tunable geometries are fabricated by a low-cost nanosphere lithography method.•Infrared optical properties of TiO2 NPA are characterized.•Wood-Rayleigh anomaly diffraction and Mie-type resonance effects of TiO2 NPA are analyzed.•Ultralow reflections of ∼2% at broad infrared waveband of 800–2000 nm are obtained by TiO2 NPA.
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Key words
TiO2 nanopillar array,Nanosphere lithography,Infrared
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