One-step growth of a nearly 2 mm thick CVD single crystal diamond with an enlarged surface by optimizing the substrate holder structure

Mengyang Feng,Peng Jin,Xianquan Meng,Pengfei Xu,Ju Wu,Zhanguo Wang

Journal of Crystal Growth（2023）

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摘要

•A modified pocket substrate holder was designed for mm-sized CVD diamond.•A 1.94 mm CVD diamond with an enlarged surface was realized by one-step growth.•The 1.94 mm CVD diamond has good crystallinity and homogeneity.

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关键词

A1. High resolution X-ray diffraction,A1. Optical microscopy,A1. Substrates,A2. Single crystal growth,A3. Chemical vapor deposition processes,B1. Diamond

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