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Liquid-Metal-Based Stretchable Dual-Parameter Sensor for Simultaneous Detection of Deformation and Temperature

Pan Zhang, JunHeng Fu,Mingyang Liu, Xiao Sun, Qian Li, Lingxiao Cao, Zi Ye,Jiahao Gong, Zhizhu He, Lin Gui

ADVANCED MATERIALS TECHNOLOGIES(2023)

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Abstract
Multiparameter sensors that can individually monitor mechanical and thermal signals from multiple stimuli have attracted immense attention. Due to interferences caused by signal crosstalk, it is a challenge for multiparameter sensors to simultaneously differentiate mechanic and thermal stimuli within a broad working range. Herein, a liquid-metal-based stretchable dual-parameter sensor that can simultaneously detect deformation (0-4.5 mm) and temperature (0-60 degrees C) is fabricated. The sensor adopts a multilayer structure in which a capacitive deformation-sensing unit is stacked on top of a resistive temperature-sensing unit. The deformation unit possesses excellent linear responses (R-2 = 0.999) and ultralow detection limit (0.04 mm, approximate to 0.02%). Attributed to these merits, the deformation unit can be used to monitor physiological actions (e.g., finger bending, swallowing, and speaking). The temperature unit exhibits strong stability under multiple stimuli. With the cooperation of the two units, the dual-parameter sensor can accurately differentiate deformation and temperature stimuli with an average error of 0.04 mm and 0.82 degrees C. Because of these remarkable performances, the sensor can achieve real-time acquisition of the deformation and temperature change during finger movements. The dual-parameter sensing abilities of the sensor indicate its promising potential in human motion monitoring and wearable devices.
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Key words
dual-parameter sensor,deformation sensing,temperature sensing,decoupling strategy,liquid metal electrodes
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