Preparation of Ag/TiO₂/ITO UV Detector and Its Photoelectronic Properties

TiO2-based UV detectors with Ag antidot/TiO2/ITO sandwich structure were prepared by RF magnetron sputtering and colloidal crystal template technology. The microstructure and photoelectronic properties of the UV detectors were investigated by SEM, XRD, four point probe and semiconductor parameter instrument. The experimental results show that pore size of Ag antidot has an obvious effect on the photoelectronic properties of the detectors. With the increase of pore size, the dark current increases and the response time is prolonged, while the photocurrent is increased at first, then is decreased. Meanwhile, it is found that photoelectronic properties are optimum when the pore size is 4.2 μm. Antidot array electrodes with large pore size possess higher electrical conductivity, lower ultraviolet transmittance and higher recombination probability of electron-hole pair. Therefore, the pore size variation exhibits significant effluence on the photoelectronic properties of the UV detector.