Semiconductor lasers with integrated metasurfaces for direct output beam modulation, enabled by innovative fabrication methods

Nanophotonics(2023)

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摘要
Semiconductor lasers play critical roles in many different systems, ranging from optical communications to absorption spectroscopy for environmental monitoring. Despite numerous applications, many semiconductor lasers have problems such as significant beam divergence and polarization instability. External optical elements like objective lenses and polarizers are usually needed to address these issues. This Review will discuss how these issues have recently been dealt with by instead integrating metasurfaces into semiconductor lasers. This necessitates the development of innovative fabrication methods; these will also be the topic of this Review. Metasurfaces can be integrated on the emitting facet of a laser. This can help select the lasing mode or can be used just to modify the output beam properties without affecting the modes. They can also be integrated monolithically with lasers through waveguides, or work in an external cavity configuration. These integrated devices provide novel optical functions, such as direct orbital angular momentum (OAM) mode generation, wavelength tuning and holographic pattern generation. We hope this Review will help extend the use of metasurface-integrated semiconductor lasers to scientific and industrial systems that employ lasers.
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关键词
metasurface,nano-optics,plasmonics,semiconductor laser,vertical cavity surface-emitting laser (VCSEL)
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