Orientation control of Platinum electrode grown on silicon using [Ca2Nb3O10]− nanosheets as seed layer.

J.J. Manguele,F. Baudouin, C. Cibert, B. Domengès,V. Demange, M. Guilloux-Viry,A. Fouchet,G. Poullain

Thin Solid Films（2023）

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摘要

•Control of Pt orientation using [Ca2Nb3O10]− nanosheets and deposition conditions.•Deposition of textured (111) Pt films on Si under standard conditions.•Deposition of textured (200) Pt films on Si using adaptive conditions.

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关键词

Platinum thin film orientation,Nanosheets,Electrode,Low temperature,Silicon substrate

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